Ultra High Vacuum Complete Lab Ready Package Includes Power supply and cooling fan.
Long life, high performance, excellent ease of operation
- Optimization of the bearing section and the control mechanism leads to lower running cost.
- TMP-B70 and TMP-B300 have higher hydrogen compression ratio.
- Local operation available
- Mounting direction free
Combination of magnetic and ceramic bearings
A proprietary damping mechanism is used to achieve low vibration and bearing cooling function, additionally provides high reliability and long service life.
High backing pressure and high compression ratio for hydrogen gas
The combination of turbine blades and molecular drag pump achieves ultra high vacuum even with high backing pressure levels. Compression ratio for hydrogen gas is:
TMP-B70: 4×105
TMP-B300: 1×105
If used in combination with a small dry vacuum pump, , it can achieve ultra-high vacuum pressures.
Integrated controller
An integrated controller makes it possible to start, stop, or reset the unit locally. The unit can also be operated by RS-485 and remote contact signals.
Computer communication software is also available. Input voltage is 24 V DC.
Low power consumption
This environmentally friendly series features a newly developed controller and a high-efficiency motor, which reduce power consumption.
Low heat-generation motor
Reducing heat generated from the motor helps prevent the bearing temperature from increasing and extends the service life.
Labyrinth seal prevents backflow (TMP-B300)
This seal helps ensure a clean vacuum by preventing the grease (base oil) used in the ceramic bearing from diffusing.
Mountable in any orientation
The pump unit can be mounted in vertical, horizontal, diagonal, or inverted orientation.
Standard Specifications
| Turbo molecular pump model | TMP-B300 | ||
|---|---|---|---|
| Cooling method | Convection | Forced air by cooling fan | |
| Ultimate pressure(note 2) | After baking | −(note 1) | 10-8 Pa order (note 2) |
| Non-baking | 10-6 Pa order | 10-6 Pa order | |
| Pumping speed(note 3) | N2 | 280 L/s | 280 L/s |
| He | 270 L/s | 270 L/s | |
| H2 | 220 L/s | 220 L/s | |
| Compression ratio | N2 | > 1 x 109 | > 1 x 109 |
| He | 7×106 | 7×106 | |
| H2 | 1×105 | 1×105 | |
| Critical backing pressure | 1500 Pa | 1500 Pa | |
| Maximum allowable continuous backing pressure(note 4) |
N2 | 100 Pa (ambient < 35°C) |
1000 Pa (ambient 25°C) 930 Pa (ambient 35°C) |
| Maximum allowable gas throughput at continuous pumping |
10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C) |
100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C) |
|
| weight | VG, ISO | 6 kg | 6.3 kg |
| ICF | 9 kg | 9.3 kg | |
| Bearing type | Passive magnetic bearing and ceramic bearing | ||
| Inlet flange | VG100, DN100CF, ISO100K | ||
| Outlet port | KF16 | ||
| Rated speed | 60000 rpm | ||
| Stat-up time（up to 80 %） | 3.5 minutes | ||
| Mounting direction | In any desired direction | ||
| Noise [Shimadzu's method](note 5) | ≤ 50 dBA | ||
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Input electric power | Voltage | DC24 V ± 5 % | |
| Maximum power | 180 W | ||
- (Note 1)Only pumps equipped with a CF flange and cooling fan can be baked.
- (Note 2)When using a two-stage oil-sealed rotary pump as an auxiliary pump.
- (Note 3)When no protective net is used. Pumping speed for N2 is 260 L/s when a protective net is used.
- (Note 4)Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min
- (Note 5)Measured for the ISO flange model.
